VACCO CubeSat Propulsion and ChEMS Flow Control Modules
VACCO Industries- TechnologyChEMS — Chemically Etched Micro Systems (patent #6,334,301), titanium micro-manifolds
- Filtration range2 to 100 microns absolute
- Sensor range20 to 3,000 psia
Patented ChEMS titanium micro-manifold modules integrating valves, filters, sensors and thrusters into compact CubeSat/SmallSat propulsion feed systems.